https://www.nist.gov/patents/apparatus-critical-dimension-localization-microscopy
Apparatus for Critical-Dimension Localization Microscopy | NIST
Mar 27, 2026 - Critical-Dimension Localization Microscopy (CDLM) is a new calibration and measurement method that establishes SI-traceability of optical microscopy and...
critical dimensionapparatuslocalizationmicroscopynist
https://www.nist.gov/publications/multiple-order-imaging-optical-critical-dimension-metrology-using-microscope
Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization |...
May 7, 2026 - There has been much recent work in developing advanced optical metrology applications that use imaging optics for optical critical dimension (OCD) measurements,
critical dimensionmultipleorderimagingoptical
https://www.bruker.com/ko/news-and-events/webinars/2022/afm-for-critical-dimension-metrology-of-trenches-lines-and-gratings.html
AFM for Critical Dimension: Metrology of Trenches, Lines and Gratings | Bruker
AFM experts showcase Bruker's AFM technology for superior critical dimension measurement of trenches, lines, and gratings
critical dimensionafmmetrology
https://www.nist.gov/publications/optical-critical-dimension-measurement-and-illumination-analysis-using-through-focus
Optical Critical Dimension Measurement and Illumination Analysis using the Through-focus Focus...
Feb 19, 2017 - In this paper we present utility of the out of focus optical microscope images for metrology applications as opposed to the best focus images.
critical dimensionopticalmeasurement
https://www.researchandmarkets.com/reports/6177656/optical-critical-dimension-ocd-measurement
Optical Critical Dimension (OCD) Measurement Equipment Market Report 2026
The Optical Critical Dimension (OCD) Measurement Equipment Market, valued at USD 1.38B in 2026, is projected to reach USD 2.11B by 2030, growing at a 11.2%...
critical dimensionmeasurement equipmentmarket reportopticalocd
https://www.nist.gov/publications/progress-towards-traceable-nanoscale-optical-critical-dimension-metrology
Progress Towards Traceable Nanoscale Optical Critical Dimension Metrology for Semiconductors | NIST
Feb 17, 2017 - Non-imaging optical critical dimension (OCD) techniques have rapidly become a preferred method for measuring nanoscale features in semiconductors.
critical dimensionprogresstowardstraceablenanoscale
https://arxiv.org/abs/2408.01266
[2408.01266] An upper critical dimension for dynamo action: A $d$-dimensional closure model study
Abstract page for arXiv paper 2408.01266: An upper critical dimension for dynamo action: A $d$-dimensional closure model study
https://www.nist.gov/publications/modeling-and-analysis-scatterometry-signatures-optical-critical-dimension-reference-0
Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material...
https://www.bruker.com/ru/news-and-events/webinars/2022/afm-for-critical-dimension-metrology-of-trenches-lines-and-gratings/watch-af20a.html
On-Demand Session: AFM for Critical Dimension: Metrology of Trenches, Lines and Gratings | Bruker
AFM experts showcase Bruker's AFM technology for superior critical dimension measurement of trenches, lines, and gratings