https://www.nanotech-now.com/news.cgi?story_id=35221
Nanotechnology Now - Press Release: Nanometrics Announces Multi-System Integrated Metrology Order...
Nanometrics Incorporated (Nasdaq: NANO), a leading supplier of advanced process control metrology systems used primarily in the manufacturing and packaging of...
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https://www.axelsystems.com/
3D Inspection Software - Axel Systems Ltd - Integrated Metrology Solution
Feb 22, 2023 - Universal software for 3D dimensional and tube inspection running on CMM Measuring Machines, Measuring Arms and Video CMM working with Renishaw Probes, 3D...
inspection softwareintegrated metrologyaxelsystemsltd
https://research.ibm.com/publications/spectral-interferometry-for-fully-integrated-device-metrology
Spectral interferometry for fully integrated device metrology for JM3 - IBM Research
Spectral interferometry for fully integrated device metrology for JM3 by Daniel Schmidt et al.
fully integratedibm researchspectralinterferometrydevice