https://www.tomshardware.com/tech-industry/canon-delivers-first-nanoimprint-lithography-tool-to-us-institute-backed-by-intel-samsung-darpa
Aims to sell 20 such tools over the next few years.
nanoimprint lithographycanondeliversfirsttool
https://www.businesswire.com/news/home/20251208175160/en/DNP-Achieves-10nm-Line-Pattern-Resolution-on-Nanoimprint-Template-for-Cutting-Edge-Semiconductors
DNP Achieves 10nm Line pattern resolution on Nanoimprint Lithography (NIL) Template for Cutting-Edge Semiconductors.
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https://www.digitimes.com/news/a20231127PD220/canon-nanoimprint-lithography-semiconductor-equipment-substrate.html
Recently, the Japanese semiconductor equipment manufacturer Canon released the nanoimprint lithography (NIL) machine FPA-1200NZ2C, capable of achieving a...
nanoimprint lithographyapplicationtechnologychallenges