Robuta

https://www.fujifilm.com/py/en/news/hq/11339
fujifilmlaunchesnanoimprintresistcompatible
https://www.tomshardware.com/tech-industry/canon-delivers-first-nanoimprint-lithography-tool-to-us-institute-backed-by-intel-samsung-darpa
Aims to sell 20 such tools over the next few years.
nanoimprint lithographycanondeliversfirsttool
https://www.fujifilm.com/my/en/business/semiconductor-materials/photoresists/nil
NIL materials for semiconductor lithography process
nanoimprint lithographynilfujifilmmalaysia
https://www.sintef.no/en/publications/publication/1990558/
electron beamnanoimprint lithographysiliconmetalensfabrication
https://www.digitimes.com/news/a20231127PD220/canon-nanoimprint-lithography-semiconductor-equipment-substrate.html
Recently, the Japanese semiconductor equipment manufacturer Canon released the nanoimprint lithography (NIL) machine FPA-1200NZ2C, capable of achieving a...
nanoimprint lithographyapplicationtechnologychallenges