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https://pure.psu.edu/en/publications/passivation-of-dry-etching-damage-using-low-energy-hydrogen-impla/ Passivation of Dry-Etching Damage Using Low-Energy Hydrogen Implants - Penn State dry etching https://www.imt.kit.edu/580.php KIT - IMT - Equipment & Facilities - Dry Etching Cluster equipment facilities dry etching kit imt cluster https://kth.diva-portal.org/smash/record.jsf?dswid=3396&pid=diva2:431013 Impact of dry-etching induced damage in InP-based photonic crystals dry etching impact induced https://www.imb-cnm.csic.es/en/micro-and-nanofabrication-clean-room/technology-offer/dry-etching Equipment and processes of the Dry Etching Area | IMB CNM of the dry etching equipment processes area https://publica.fraunhofer.de/entities/publication/48914f4c-8834-47df-82f2-113a36f42ee5 Flux characteristics of reactive particles in submicron dry etching techniques Low pressure high frequency plasmas running on reactive gases are applied in industrial fabrication of microelectronic devices. Submicron pattern transfer into... dry etching flux characteristics reactive particles https://corde.phy.cam.ac.uk/nanofabrication/core-nanofabrication/dry-etching/ Dry etching - CORDE Web Portal Feb 11, 2026 - Dry Etching Brief description We have a small suite of dry etch tools for both reactive ion etching (RIE) and inductively coupled plasma (ICP) etching. These... dry etching corde web portal https://www.aphys.kth.se/sv/research/joint-facilities/nanolab/micro-nanofabricati/etch Dry Etching | KTH dry etching kth https://publications-cnrc.canada.ca/fra/voir/objet/?id=d30f1eed-4da4-4a63-8d53-1ce3b51bd0f0 Laser-assisted dry etching ablation of InP - Archives des publications du CNRC - Canada.ca Laser-assisted dry etching ablation of InP https://research.ibm.com/publications/comparison-of-cllessinfgreater2lessinfgreaterhe-cllessinfgreater2lessinfgreaterar-and-cllessinfgreater2lessinfgreaterxe-plasma-chemistries-for-dry-etching-of-nife-and-nifeco Comparison of Cl2/He, Cl2/Ar, and Cl2/Xe plasma chemistries for dry etching of NiFe and NiFeCo for... https://research-repository.uwa.edu.au/en/publications/control-of-sidewall-profile-in-dry-plasma-etching-of-polyimide/ Control of Sidewall Profile in Dry Plasma Etching of Polyimide - the UWA Profiles and Research... https://conservancy.umn.edu/items/158c32a2-2832-4108-8803-eef36da14cb7 Microleakage of self-etching sealants on dry and saliva contaminated enamel. Purpose: To compare the microleakage of a self-etching sealant with a traditional phosphoric acid-etched sealant under non-contaminated and saliva-contaminated... self etching sealants https://researchportalplus.anu.edu.au/en/publications/o-dry-etching-characteristics-of-amorphous-as2-s3-film-in-chf3-pl/fingerprints/ O Dry etching characteristics of amorphous As2 S3 film in CHF3 plasma - Fingerprint - The... https://research.tudelft.nl/en/publications/high-speed-anisotropic-dry-etching-of-conbzr-for-next-generation--3/ High Speed anisotropic dry etching of CoNbZr for next generation magnetic recording. - TU Delft... https://nrc-publications.canada.ca/eng/view/object/?id=465ad068-459c-43d4-a383-cad95c2bbbfd Laser-assisted dry etching ablation for microstructuring of III-V semiconductors - NRC Publications... Laser-assisted dry etching ablation for microstructuring of III-V semiconductors https://nrc-publications.canada.ca/eng/view/object/?id=4b51ec8b-5fdc-4594-8c0a-0d4488f48941 Study of wet and dry etching processes for antimonide-based photonic ICs - NRC Publications Archive... Study of wet and dry etching processes for antimonide-based photonic ICs https://www.nanofab.utah.edu/silicon-drie-icp-rie-xef2-dry-isotropic-or-wet-chemical-acid-base-thick-or-thin-filmetching/ DRIE, ICP RIE, XeF2 dry silicon isotropic, or wet chemical acid/base thick or thin film etching |... https://researchportalplus.anu.edu.au/en/publications/high-index-contrast-polysiloxane-waveguides-fabricated-by-dry-etc/ High index contrast polysiloxane waveguides fabricated by dry etching - The Australian National... high index