https://www.kth.se/mst/research/sensors/project/wafer-bonding-for-mems-1.864219
Wafer bonding for MEMS | KTH
wafer bondingmemskth
https://dspace.rpi.edu/items/1fd2c816-2f5d-4213-8409-0062ef5a3d6e
Damascene patterned metal / adhesive wafer bonding for three-dimensional integration
wafer bondingfor threedamascenepatternedmetal
https://dspace.mit.edu/handle/1721.1/30156?show=full
Copper wafer bonding in three-dimensional integration
wafer bondingthree dimensionalcopperintegration
https://eprints.soton.ac.uk/43610/
Nanoprecision alignment for wafer bonding - ePrints Soton
wafer bondingalignmenteprintssoton
https://intra.kth.se/en/aktuellt/kalender/heterogeneous-integration-technologies-based-on-wafer-bonding-and-wire-bonding-for-micro-and-nanosystems-1.924187?date=2019-10-04&orgdate=2019-08-05&length=1&orglength=149
Heterogeneous Integration Technologies Based on Wafer Bonding and Wire Bonding for Micro and...
heterogeneous integrationwafer bondingtechnologiesbased
https://www.evgroup.com/
EV Group | Semiconductor Manufacturing Equipment and Process Solutions for Wafer Bonding, Optical...
EV Group (EVG) is a leading supplier of equipment and process solutions for the manufacture of semiconductors, microelectromechanical systems (MEMS), compound...
ev groupsemiconductor manufacturing
https://research.utwente.nl/en/publications/low-temperature-sacrificial-wafer-bonding-for-planarization-after/
Low temperature sacrificial wafer bonding for planarization after very deep etching - University of...
https://patents.google.com/patent/US9224631B2/
US9224631B2 - Multiple bonding layers for thin-wafer handling - Google Patents
Multiple bonding layer schemes that temporarily join semiconductor substrates are provided. In the inventive bonding scheme, at least one of the layers is...
wafer handlingmultiplebondinglayersthin
https://research.ibm.com/publications/iiiv-layer-growth-on-si-and-ge-surfaces-for-direct-wafer-bonding-as-a-path-for-hybrid-cmos
III/V layer growth on Si and Ge surfaces for direct wafer bonding as a path for hybrid CMOS for...
III/V layer growth on Si and Ge surfaces for direct wafer bonding as a path for hybrid CMOS for ITNG 2014 by Emanuele Uccelli et al.
https://research.ibm.com/publications/sige-on-insulator-prepared-by-wafer-bonding-and-layer-transfer-for-high-performance-field-effect-transistors
SiGe-on-insulator prepared by wafer bonding and layer transfer for high-performance field-effect...
SiGe-on-insulator prepared by wafer bonding and layer transfer for high-performance field-effect transistors for Applied Physics Letters by L.J. Huang et al.
https://origin.ieeetv.ieee.org/hbs/wafer-to-wafer-bonding-overlay-co-optimization-with-lithography-and-hidden-patterns
Wafer-to-wafer Bonding Overlay: Co-Optimization with Lithography and Hidden Patterns | IEEETV
Presented at the 2026 IEEE Hybrid Bonding Symposium, Jan 22-23, 2026 in Silicon Valley. More information below.(36:15) Dr. Anton Alexeev, EV GroupSummary:...
https://publica.fraunhofer.de/entities/publication/55a1b03c-f50a-4768-91af-94613c493c88
Reliable wafer-level-bonding method for MEMS packaging using LTCC interposers
The anodic bonding of low temperature co-fired ceramics (LTCC) for the wafer-level-packaging of MEMS represents a cost efficient and highly reliable packaging...
mems packagingreliablewaferlevelbonding
https://ieeetv.ieee.org/hbs/reducing-wafer-to-wafer-bonding-misalignment-to-enable-sub-150nm-pitch-hybrid-bonding
Reducing Wafer-to-Wafer Bonding Misalignment to Enable sub 150nm Pitch Hybrid Bonding | IEEETV
reducingwaferbondingmisalignment
https://kth.diva-portal.org/smash/record.jsf?pid=diva2:1665889
Stacking of two-dimensional materials to large-area heterostructures by wafer bonding
two dimensional
https://research.ibm.com/publications/heterogeneous-integration-of-iii-v-materials-by-direct-wafer-bonding-for-high-performance-electronics-and-optoelectronics
Heterogeneous integration of III-V materials by direct wafer bonding for high-performance...
Heterogeneous integration of III-V materials by direct wafer bonding for high-performance electronics and optoelectronics for IEEE T-ED by Daniele Caimi et al.