https://www.nist.gov/publications/thermally-stable-thin-film-filters-high-power-extreme-ultraviolet-applications
We investigated several types of thin-film filters for high intensity work in the extreme-ultraviolet (EUV) spectral range.
thin filmhigh powerextreme ultravioletstablefilters
https://www.nist.gov/publications/exposure-dose-effects-reaction-diffusion-process-model-extreme-ultraviolet-photoresists
The effect of exposure dose on the latent image deprotection profile in a model extreme ultraviolet (EUV) photoresist polymer, poly(hydroxystyrene-co-d9-tert-bu
on thereaction diffusionexposuredoseeffects